Sputtering targets from crystalline Silicon

  • We produce targets, both single pieces and complete sets
  • Resistance  – as per customer’s specifications
  • Conductivity type:  – P or N
  • Shape  – round or rectangular 
  • Maximum diameter – ะค155 ± 0,1 mm
  • Maximum diagonal of rectangular targets  – 160 ± 0,2 mm
  • Maximum thickness – 100 mm ± 0,025 mm